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发明名称
Opto-mechanical automatic focusing system and method
摘要
申请公布号
EP0570726(B1)
申请公布日期
1996.03.20
申请号
EP19930106737
申请日期
1993.04.26
申请人
AMRAY, INC.
发明人
LIN, SHIH-CHAO
分类号
G01B11/02;G02B7/198;G02B7/28;H01J37/21;H01J37/22;(IPC1-7):H01J37/21
主分类号
G01B11/02
代理机构
代理人
主权项
地址
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