Plasma apparatus, and method and system for extracting electrical signal of member to which high-frequency-wave is applied,申请号EP19910112122-传众专利搜索

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发明名称	Plasma apparatus, and method and system for extracting electrical signal of member to which high-frequency-wave is applied
摘要
申请公布号	EP0467391(B1)	申请公布日期	1996.03.20
申请号	EP19910112122	申请日期	1991.07.19
申请人	TOKYO ELECTRON LIMITED;KABUSHIKI KAISHA TOSHIBA	发明人	NOZAWA, TOSHIHISA;KAMIKANDA, OSAMU;YOSHIDA, YUKIMASA;OKANO, HARUO
分类号	C23F4/00;G01K7/00;G01K7/26;H01J37/32;H01L21/302;H01L21/3065;H01L21/66;(IPC1-7):H01J37/32	主分类号	C23F4/00
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