EXHAUSTING METHOD OF VACUUM SYSTEM

摘要

PURPOSE: To realize an exhausting method of a vacuum system which can carry out the pressure control in a wide scope easily. CONSTITUTION: This air exhausting method of a vacuum system has an exhauster composed by connecting the first vacuum pump 13-1 and the second vacuum pump 13-2 in series, and the first vacuum pump 13--1 is operated in the scope of the regular rotation and the reverse rotation, while the second vacuum pump 13-2 is operated in the rotation in a specific direction.