CERAMIC COATING MEMBER AND ITS PRODUCTION

摘要

PURPOSE: To obtain a ceramic coating member excellent in heat resistance, thermal shock resistance, corrosion resistance and durability by applying silicon nitride or silicon carbide by CVD on the surface of a silicon nitride or silicon carbide ceramic base material and further applying an oxide thereon. CONSTITUTION: The silicon nitride or silicon carbide is applied by CVD on the surface of the silicon nitride or silicon carbide ceramic base material. And the oxide coating film composed of at least two layers of a substrate and a surface layer is formed by applying a zirconia paste or an alumina paste on the CVD coating film so as to make film thickness into, 10-35μm rising a temp. at <=500 deg.C/hr temp. rising rate and heat treating at >=1450 deg.C for 10hr in the air. The substrate is composed of zircon or mullite formed by chemical reaction and the surface layer is composed of zirconia or alumina. The coating is executed >=1 times at need and the thickness of the oxide coating film is preferably 10-70μm in all.