| 摘要 |
PURPOSE: To dispense with repeated inspection and adjustment for a long period of time by controlling output based on an output value at a machining point. CONSTITUTION: A reflecting mirror 23 is rotatably driven by a motor 21, a driving part for the reflecting mirror, and is thereby made to periodically cross the last optical path between the terminating end and the machining point of an optical system, a path from a condensing lens 11 to the machining point. The intensity of a laser beam is detected by a sensor 30 which is arranged at the reflecting position of the laser beam when the reflecting mirror 23 crosses the last optical path. In other words, the intensity is detected by reflecting a part of the laser beam on the last optical path, and is controlled by feeding back. |
