发明名称 METALORGANIC COMPOUNDS
摘要 The invention concerns a process for preparing metalorganic compounds and metalorganic amine adducts. A Grignard reagent is prepared and reacted with the metal halide in an amine solvent. The amine used can form a useful adduct with the metalorganic compound produced. Either the metalorganic compound or its amine adduct may be used for growing semiconductor layers by vapor phase epitaxial techniques.
申请公布号 WO9607660(A1) 申请公布日期 1996.03.14
申请号 WO1995GB02087 申请日期 1995.09.04
申请人 SECRETARY OF STATE FOR DEFENCE, ACTING THROUGH HIS;JONES, ANTHONY, COPELAND;RUSHWORTH, SIMON, ANDREW;MARTIN, TREVOR;WHITTAKER, TIMOTHY, JOHN;FREER, RICHARD, WILLIAM 发明人 JONES, ANTHONY, COPELAND;RUSHWORTH, SIMON, ANDREW;MARTIN, TREVOR;WHITTAKER, TIMOTHY, JOHN;FREER, RICHARD, WILLIAM
分类号 C07F5/00;C07F9/50;C23C16/18;C30B25/02;C30B29/40;H01L21/203;H01L21/205 主分类号 C07F5/00
代理机构 代理人
主权项
地址