| 发明名称 |
Apparatus and method for making metal oxide sputtering targets |
| 摘要 |
An apparatus and process for making metal oxide sputtering targets from volatile and thermally unstable metal oxide powder by enveloping the metal oxide powder in at least one layer of a barrier material while the powder is hot-pressed using a graphite die assembly. |
| 申请公布号 |
AU1187195(A) |
申请公布日期 |
1996.03.14 |
| 申请号 |
AU19950011871 |
申请日期 |
1994.11.22 |
| 申请人 |
MATERIALS RESEARCH CORPORATION |
发明人 |
CHI-FUNG LO;JOHN TURN;DAVID P STRAUSS |
| 分类号 |
C04B35/457;C04B35/645;C23C14/34 |
主分类号 |
C04B35/457 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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