PROCESS FOR PRODUCING SURFACE MICROMECHANICAL STRUCTURES,申请号EP19940915017-传众专利搜索

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发明名称	PROCESS FOR PRODUCING SURFACE MICROMECHANICAL STRUCTURES
摘要
申请公布号	EP0700524(A1)	申请公布日期	1996.03.13
申请号	EP19940915017	申请日期	1994.05.11
申请人	ROBERT BOSCH GMBH	发明人	OFFENBERG, MICHAEL
分类号	C23F1/00;B81B3/00;C23F1/12;C23F1/24;C23F4/00;G01P15/08;H01L21/302;H01L21/3065;(IPC1-7):G01P15/08	主分类号	C23F1/00
代理机构		代理人
主权项
地址

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