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发明名称
Radiosensitive polymer and positive working recording material
摘要
申请公布号
EP0395992(B1)
申请公布日期
1996.03.13
申请号
EP19900107724
申请日期
1990.04.24
申请人
BASF AKTIENGESELLSCHAFT
发明人
SCHWALM, REINHOLD, DR.
分类号
C08G75/00;G03F7/004;G03F7/039;G03F7/075;H01L21/027;H01L21/30;(IPC1-7):G03F7/039;C08G77/00;H01L21/312;C08G64/00;H01L21/47
主分类号
C08G75/00
代理机构
代理人
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