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发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0869994(A)
申请公布日期
1996.03.12
申请号
JP19940205630
申请日期
1994.08.30
申请人
FUJITSU LTD
发明人
MIFUNE AKITO
分类号
H01L21/285;H01L21/28;H01L21/302;H01L21/3065;H01L21/3205;H01L23/52;(IPC1-7):H01L21/306;H01L21/320
主分类号
H01L21/285
代理机构
代理人
主权项
地址
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