PRODUCTION OF HIGH PURITY PHOTOSENSITIVE RESIN COMPOSITION

摘要

PURPOSE: To efficiently remove metallic impurities and halogen ions and to obtain a photosensitive resin compsn. excellent in sensitivity and preservation stability by treating a photosensitive resin compsn. or a component of the compsn. with a specified adsorbent. CONSTITUTION: A photosensitive resin compsn. or part or all of the constituents of the compsn. are dissolved in an org. solvent. and the resultant soln. is brought into contact with an adsorbent made of a compd. represented by the formula Al2 O3 .-nH2 O [where (n) is 0-5 and H2 O is water as a crystal forming component]. The photosensitive resin compsn. is not especially limited and any of positive and negative type photosensitive resin compsns. known as photoresists may be used. A photosensitive compd. and/or an alkali-soluble resin is dissolved in an org. solvent and brought into contact with the adsorbent. The concn. of the photosensitive compd. is usually 0 to 30wt.% and that of the alkali-soluble resin is usually 0 to 50wt.%.