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发明名称
SPUTTERING TREATMENT
摘要
申请公布号
JPH0867983(A)
申请公布日期
1996.03.12
申请号
JP19940203197
申请日期
1994.08.29
申请人
FUJITSU LTD
发明人
WATABE MASAYUKI
分类号
C23C14/34;C23C14/54;(IPC1-7):C23C14/54
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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