| 摘要 |
<p>PURPOSE: To prevent lines on the switched side from being connected to each other at the switching time in a three-way switching controller used in a semiconductor manufacturing plant or the like so as to handle high purity gas or the like. CONSTITUTION: A three-way switching controller is constituted of a body 2, valves 3, 4, a cylinder 5, link mechanism 6, and a floating means 7. The cylinder 5 is to be one, and the link mechanism 6 for alternately opening/closing the respective valves 3, 4 by the operation of the cylinder 5 is provided between the cylinder 5 and the respective valves 3, 4. The floating means 7 for putting the respective valves 3, 4 in the free state at the initial motion time of the cylinder 5 is provided at part of the link mechanism 6.</p> |
