| 摘要 |
<p>PURPOSE: To provide such a means for an active matrix liquid crystal driving device to realize both of transistors having excellent characteristics and pixels having good light-transmitting property. CONSTITUTION: The device has the following structure. A transistor 6, pixel electrode 2, scanning bus 4, and data bus 5 are formed on a first substrate 1, while a transparent conductive film 15 is formed on a second substrate 12 which faces the first substrate with a liquid crystal 11 interposed. At least one of the substrates consists of a transparent semiconductor such as a SiC single crystal having 6H-SiC structure or polycrystalline SiC and the semiconductor substrate is used as the active layer of the transistor. The resistance of the SiC substrate can be decreased by ion implantation method using N2 , NH3 and Al(CH3 )3 .</p> |
