SCANNING PROBE AND SCANNING PROBE DEVICE

摘要

PURPOSE: To provide a scanning probe with a scanning probe microscope having time resolution and a single chip having imaging performance and high speed electric measurement combined to allow electric measurement outside a vacuum where there is no possibility of using high energy electrons and low possibility of damaging. CONSTITUTION: A ultra high speed scanning probe 10 has a response time of 2.5 pico-seconds and a space resolution of 10 nanometers. A single probe chip 12 is formed on an input electrode layer 14, at least partly formed on the cantilever 22 of the probe. The cantilever 22 is formed with at least one layer containing AlGaAs film having a reflection upper face to reflect laser beam therefrom. A switch with flat photoresponse is formed with a part of an input electrode layer 14, a part of a semiconductor of at least one layer and a part of an output electrode layer 18.