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发明名称
METHOD OF MAKING HOLDER FOR PHOTO MASK
摘要
申请公布号
JPS53148452(A)
申请公布日期
1978.12.25
申请号
JP19770062840
申请日期
1977.05.31
申请人
NIPPON CHEMICAL IND
发明人
KAMEYAMA MASAOMI
分类号
G02B7/00;H01L21/00;H01L21/027
主分类号
G02B7/00
代理机构
代理人
主权项
地址
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