EVALUATION OF SURFACE OF SAMPLE

摘要

PURPOSE: To simply and rapidly detect the emission spectrum related only to the surface state of a sample. CONSTITUTION: An internally vacuum cryostat 8 is provided on a fine adjustment stand 14 and a heat sink 12 is provided in the cryostat 8 and a tank 13 storing liquid nitrogen is provided to the heat sink 12 while a semiconductor substrate sample 7 is attached to the upper surface of the heat sink 12 by mounting vacuum grease 11 and laser beam 1 is condensed by an objective lens 4 until the diameter thereof becomes about severalμm to irradiate the end surface of the semiconductor substrate sample 7 and the photoluminescence beam 2 and reflected beam from the semiconductor substrate sample 7 are received through the objective lens 4 to be separated by a beam splitter 3 and the spectrum of the photoluminescence beam 2 is detected by a sepctroscope 5 and a photodetector 6.