发明名称 MANUFACTURE OF CONSTITUENT ELEMENT BY ANODE BONDING METHOD AND CONSTITUENT ELEMENT
摘要 PROBLEM TO BE SOLVED: To enable a pressing force of negative pressure to be uniformly distributed over all the surfaces of component parts to be bonded. SOLUTION: A first component part 1, a bonding layer 11 and/or a second component part 2 are structured so as to enable hollow chambers 12 to be formed adjacent to the first component part 1 and/or the second component part 2 and to the second component part 2 and/or the first component part 1. A negative pressure is induced in the hollow chambers 12, whereby the first component 1 and the second component 2 are pressed against each other.
申请公布号 JPH0870021(A) 申请公布日期 1996.03.12
申请号 JP19950206157 申请日期 1995.08.11
申请人 ROBERT BOSCH GMBH 发明人 HERUMUUTO BAUMAN
分类号 C04B37/00;H01L21/58;H01L21/60;H01L21/603;(IPC1-7):H01L21/603 主分类号 C04B37/00
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