| 摘要 |
PURPOSE: To obtain a chip arranging constitution which does not impair the resolution performance and alignment accuracy over the entire surface of chips as far as possible, in a method for forming a reticle and a semiconductor device. CONSTITUTION: Respective chip regions are so arranged that the pattern regions 4 of the respectively very small widths within the plural chip regions in the reticle are formed so as to come nearest to the reticle center 5 of the reticle when the reticle has the pattern regions 4 of the extremely small width with respect to the pattern regions 3 of the ordinary width in the chip regions 2 in a part within the chip regions. The respective chip regions are so arranged that the regions 4 of a small margin for alignment in the plural chip regions 2 in the reticle are formed so as to come nearest to the reticle center 5 of the reticle when the reticle has the pattern regions 4 of the small margin for alignment with respect to the pattern regions of the ordinary margin for alignment in the chip regions 2 in a part within the chip regions. The semiconductor patterns are baked on a semiconductor substrate by using these reticles. |
