| 摘要 |
PURPOSE: To easily and accurately measure the thickness of a magnetic garnet crystal film by finding difference between the value of magnetic field of a ferromagnetic resonance spectrum and the value of magnetic field of a Walker mode spectrum, using the resonance of electron spin resonance. CONSTITUTION: The value H1 of magnetic field of a ferromagnetic resonance spectrum A at a point (a) and the value H2 of magnetic field of a Walker mode spectrum B at a point (b) are calculated electron spin resonance (ESR) and, then, a relationship of t=1/α.Hd (a = proportion constant) is thereby found between the difference Hd of the values H1 and H2 , and the thickness (t) of a crystal film. Thereafter, the film thickness (t) of several types of samples having different film thickness is observed by use of a scanning type electron microscope through the application of the relationship, depending on the material composition of a sample or the size thereof. Then, the corresponding difference Hd due to ESR is obtained to determine the value ofα. As a result, the required thickness (t) of the crystal film can be subsequently measured simply by obtaining the difference Hd . Furthermore, the thickness (t) can be measured in nondestructive state without any need of cutting out the sample, depending on a crystal size and a process can be simplified.
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