SEMICONDUCTOR ACCELERATION SENSOR

摘要

PURPOSE: To provide a semiconductor acceleration sensor which can detect acceleration only in the predetermined axial direction by eliminating influence of acceleration in the other axial direction. CONSTITUTION: In an acceleration sensor wherein a sensor circuit of CMOS inverter structure is formed on a substrate 10 having processed thinner diaphragms 13a to 13d and having heavy weights 12 at the peripheral thick area 11 and at the center thereof, a first sensor circuit 21a is provided near the boundary 14a in the side of the peripheral thick areas 11 of the thinner diaphragms 13a, 13b in the X-axis direction, while the second sensor circuit 21b is also provided near the boundary 14b. Outputs of these sensor circuits 21a, 21b are added to detect only the acceleration in the Z-axis direction without influence of the acceleration in both X- and Y-axis directions.