| 摘要 |
PURPOSE: To prevent the damage to a base reverse surface during manufacturing process, and provide a highly reliable glass waveguide element by forming a protecting film on the base reverse surface. CONSTITUTION: After a core glass film 11 is formed on a quartz glass base 10, a Si film (protecting film) 12 is formed on the reverse surface of the base 10 by spattering. Thereafter, the core glass film 11 is worked to form a core waveguide part 13, a porous glass layer 14 is further accumulated thereon, this is transparentized to form a clad part 15, and the resulting base 10 is cut into a prescribed dimension by a dicing device. The resulting chip 16 is put in a mixed solution 17 to remove the Si film 12 of the chip 16, and a glass waveguide element 18 is formed. At the handling of the base, the Si film 12 effectively protects the reverse surface of the base 10. |
