| 摘要 |
PURPOSE: To ensure accurate measurements at a low installation cost without any restriction by a measuring head installation place by correcting detected second-order X-ray intensity, so as to cope with distance between an object to be measured and a measuring head, and the inclination of the measuring head. CONSTITUTION: Range finders 6A and 6B mounted on a measuring head 3 generate signals corresponding to distances D1 and D2 up to object 2 to be a measured. Also, the distance calculation means of a processing circuit 7 calculates distances d1 and d2 from the head 3 to the object 2, thereby finding the actual distance dA of the head 3 and the object 2 relative to a measuring center A. In addition, the inclination amount calculation means of the circuit 7 calculates the inclination angleθA of the object 2 relative to the head 3, on the basis of distances d1 and d2 , and a distance between both finders 6A and 6B. Thereafter, a correction amount corresponding to the obtained actual distance dA and inclination angleθA is calculated, using an equation to find the correction amount of a secondary X-ray intensity for the variation of the actual distance dA and actual inclination angleθA stored in a memory, thereby correcting the secondary X-ray intensity detected with an X-ray detector 5.
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