ELECTRON EMITTING ELEMENT, ELECTRON SOURCE, IMAGE FORMING DEVICE AND MANUFACTURE THEREOF

摘要

PURPOSE: To provide a surface conduction type electron emitting element which excels in uniformity and productivity and is easy to deal with size enlarging CONSTITUTION: Element electrodes 4, 5 are formed on an insulating substrate 1, and a masking layer 31 covering the region other than a conductive thin film is formed thereon. The substrate is immersed in the molten bath of electroless palladium to form a conductive thin film 3 comprising the very fine particles of palladium. The masking layer is removed by a solvent and sintered by heating in the atmosphere to make a conductive thin film comprising very fine particles of PdO and electrification treatment is applied thereto to form an electron emitting part 2.