发明名称 DEVELOPER FOR COMBINED RESIN
摘要 PURPOSE: To obtain a developer capable of attaining development to a combined resin having photosensitive groups made of a mixed system with a polyether sulfone with superior resolution without leaving residue on development. CONSTITUTION: This developer is a developer for a resin compsn. consisting of a resin having photosensitive groups and polyether sulfone and contains a compd. represented by formula CH3 O-(CH2 CH2 O)n -CH3 (where 1<=n<=5) as an essential component.
申请公布号 JPH0862858(A) 申请公布日期 1996.03.08
申请号 JP19940199228 申请日期 1994.08.24
申请人 IBIDEN CO LTD 发明人 OU TOUTOU;ASAI MOTOO
分类号 G03F7/039;C08L81/00;C08L81/06;G03F7/32;(IPC1-7):G03F7/32 主分类号 G03F7/039
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