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发明名称
FABRICATION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0864678(A)
申请公布日期
1996.03.08
申请号
JP19940219504
申请日期
1994.08.22
申请人
SONY CORP
发明人
MUROYAMA MASAKAZU
分类号
H01L21/3205;H01L21/312;H01L21/469;H01L21/768;(IPC1-7):H01L21/768;H01L21/320
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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