| 摘要 |
PURPOSE: To productively manufacture an optical member having an antireflective property that is excellent in abrasion resistance, adhesion, and heat resistance by forming an antireflection coating on an optical base material by means of a plasma polymerization using an organic metallic compound. CONSTITUTION: By means of a plasma polymerization by which the kind of an organic metallic compound and/or the relative supply quantity of oxygen gas to the organic metallic compound are changed, an antireflection coating consisting of a laminated body in which a high refractive index layer and a low refractive index layer are alternately laminated is formed on an optical base material 3. For instance, in a plasma CVD device, a lens base material 3 is set on a base material holder 2, and phenldimethylsilane gas is introduced into a vacuum vessel 1 from a container 5, and hexamethyldisiloxane gas from a container 9, and also O2 gas from a container 10 respectively, so that plasma polymerization is carried out for forming a high refractive index layer. Then, the supply of phenyldimethylsilane gas is stopped, and the flow rate of O2 gas is changed for forming a low refractive index layer. |
