| 摘要 |
A rotatable magnetron apparatus comprising: a cylindrical target having first and second target ends and being rotatable about a longitudinal axis thereof; at least one support structure for carrying therein a spindle, the one support structure having a bearing surface therein; the spindle being capable of engaging one of said first and second target ends and having an annular outer surface along a portion thereof; and a unitary seal cartridge having outer and inner shells, an annular space therebetween, and a bearing and at least one vacuum seal disposed within the annular space, the outer shell disposed adjacent the bearing surface of the support structure and rotationally fixed with respect thereto, the inner shell surrounding the annular outer surface of said spindle and rotationally fixed with respect thereto. <MATH> |
