| 摘要 |
PURPOSE: To provide a radiation inspecting apparatus which can suitably obtain the sectional image of a specimen to be inspected by utilizing the difference of radiation energy distribution by the radiation absorption of the specimen to be inspected. CONSTITUTION: X-ray beams 3 of X-ray energies E1, E2 varying at each time generated from an X-ray tube 2 at moving positions are projected to a specimen 4 to be inspected while slightly moving the tube 2, the specimen 4 to be inspected and an X-ray detector 6 in the relative positional relationship. The X-ray transmitted through the specimen to be detected is detected by the detector 6, and the process of storing the detected X-ray transmitted data corresponding to the energies E1, E2 in the image memory 13 of an image processor 11 is conducted at each moved position. The data stored in the memory 13 is added for every energy level, superposed, and calculated to obtain a signal and to hence obtain an X-ray laminography image based on the signal. |
