| 摘要 |
<p>A temperature calibration substrate (10) for producing increased temperature measurement accuracy. The temperature calibration substrate includes cavity means (13) located below the surface of said substrate and thermocouple means (15) disposed in the cavity for measuring the temperature of the substrate. The cavity means includes a cavity opening, an inner perimeter, and a length. Heat transfer means is disposed in the cavity means between the thermocouple means and the inner perimeter of the cavity means for transferring heat from the substrate to the thermocouple means. The cavity means is shaped to allow the thermocouple means to lie in close proximity to the substrate, and the thermocouple wires (14) are positioned substantially adjacent the inner perimeter of the cavity means and traverse the length of the cavity means thereby enhancing heat transfer efficiency from the substrate to the thermocouple means (15).</p> |
