Electron beam pattern-writing column,申请号GB19960000166-传众专利搜索

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发明名称	Electron beam pattern-writing column
摘要
申请公布号	GB9600166(D0)	申请公布日期	1996.03.06
申请号	GB19960000166	申请日期	1996.01.05
申请人	LEICA LITHOGRAPHY SYSTEMS LIMITED	发明人
分类号	H01J37/12;H01J37/30;H01J37/305;H01L21/027	主分类号	H01J37/12
代理机构		代理人
主权项
地址

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