发明名称 Method for producing a luminous element of III-group nitride
摘要 Disclosure is a process for producing a luminous element of III-group nitride semiconductor having a crystal layer (AlxGa1-x)1-yInyN (0</=x</=1, 0</=y</=1) to which a II-group element is added, comprising the steps of forming a crystal layer (AlxGa1-x)1-yInyN (0</=x</=1, 0</=y</=1) to which a II-group element is added; irradiating a low energy electron beam onto a topmost surface of the crystal layer to reform only the crystal layer; forming a thin film for absorbing optical energy on the topmost surface of the crystal layer; and pulse-heating the thin film for absorbing optical energy by heating means to reform only the crystal layer, thereby to produce a bluish green, blue or UV light emitting diode or a semiconductor laser diode with a high precision color purity.
申请公布号 US5496766(A) 申请公布日期 1996.03.05
申请号 US19950411467 申请日期 1995.03.28
申请人 PIONEER ELECTRONIC CORPORATION 发明人 AMANO, HIROSHI;AKASAKI, ISAMU;TANAKA, TOSHIYUKI;TOHMA, TERUO;MANABE, KATSUHIDE
分类号 H01L33/12;H01L33/32;H01L33/40;H01S5/00;H01S5/323;(IPC1-7):H01L21/20 主分类号 H01L33/12
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