发明名称 |
Electron beam radiator with cold cathode integral with focusing grid member and process of fabrication thereof |
摘要 |
A first laminated sub-structure having a semiconductor substrate, a lower insulating layer on the semiconductor substrate, emitter electrodes formed in micro-apertures in the lower insulating layer and a gate electrode on the upper surface of the lower insulating layer is aligned with a second laminated sub-structure having a transparent upper insulating layer and a grid member on the transparent upper insulating layer by means of a stepper, and the first and second laminated sub-structures are fixed to each other through a field assisted glass-metal sealing technique.
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申请公布号 |
US5496199(A) |
申请公布日期 |
1996.03.05 |
申请号 |
US19950447700 |
申请日期 |
1995.05.23 |
申请人 |
NEC CORPORATION |
发明人 |
MAKISHIMA, HIDEO;YAMADA, KEIZO;TOMIHARI, YOSHINORI |
分类号 |
H01J1/304;H01J3/02;H01J3/14;H01J3/18;H01J9/02;H01J23/04;H01J29/04;H01J37/073;(IPC1-7):H01J9/18;H01J1/30 |
主分类号 |
H01J1/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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