| 摘要 |
<p>PURPOSE: To provide a conveying vessel capable of easily corresponding to changing an attitude of a workpiece and to taking it out, by preventing the workpiece from staining. CONSTITUTION: One sides of fixed/variable vessels 2A, 2B of U-shaped section are connected by a fixed vessel hinge 3, variable vessel hinge 4 and a hinge pin 5. Fixed side lock pin receivers 8A, 8B are protrusively provided in the other side of the fixed vessel 2A, and a movable side lock pin receiver 9 is protrusively provided in the other side of the movable vessel 2B. Lock pins 7A, 7B are inserted through these fixed side lock pin receivers 8A, 8B and movable side lock pin receiver 9. In an internal surface of the movable vessel 2B, a cassette support 11 is protrusively provided in a position inside a mounting part of the movable side lock pin receiver 9 and oppositely placed to a side surface of a wafer cassette 31 stored inside.</p> |
