Laser ablation nozzle

摘要

A laser ablation apparatus includes a nozzle, disposed through a housing, wherein the nozzle has: (i) a nozzle housing comprised of a bottom surface; (ii) a first orifice defined by the bottom surface; (iii) a second orifice defined by the bottom surface; (iv) a first passageway defined by the nozzle housing in communication with the first orifice; and (v) a second passageway defined by the nozzle housing in communication with the second orifice, wherein the portion of the second passageway adjacent the second orifice forms an angle theta 3 with the portion of the first passageway adjacent the first orifice, wherein the angle theta 3 is effective for directing a first fluid stream through the second orifice at the surface of the enclosed substrate portion to facilitate removal of the coating in the form of coating debris during or subsequent to exposure of the coating of an enclosed substrate portion to high energy radiation. A high energy radiation generating apparatus and a first fluid stream generating apparatus are coupled to the nozzle. A second fluid stream nozzle is disposed in a direction for directing a second fluid stream against the first fluid stream to keep coating debris inside the housing. Exhausting apparatus is coupled to the housing.