Spacial light modulation device including a pixel electode layer and a method for manufacturing the same

摘要

A spacial light modulation device is composed of a photoconductive layer, a pixel electrode layer, a dielectric reflection layer, and a liquid crystal layer all laminated in sequence between first and second drive electrode layers. The pixel electrode layer includes a plurality of pixel electrodes partitioned by an insulating substance layer and arranged at predetermined intervals. In particular, to obtain higher contrast and higher resolution of the modulated and reflected light by the device, the surface area of each of the pixel electrodes formed on the photoconductive layer side is determined smaller than that formed on the dielectric reflection layer side. That is, in the pixel electrode layer, a plurality of square-shaped pixel electrodes are arranged into a matrix pattern at predetermined intervals. Each of the square-shaped pixel electrode is composed of a Schottky contact portion in contact with the photoconductive layer and a pixel composing portion in contact with the dielectric reflection layer. The contact area of the Schottky contact portion with the photoconductive layer is determined smaller than the contact area of the pixel composing portion with the dielectric reflection layer. It is also preferable that a dielectric planarized layer is further formed between the pixel electrode layer and the dielectric reflection layer to planarize the surface of the dielectric reflection layer.