APPARATUS TO CLEAN SOLID SURFACES USING A CRYOGENIC AEROSOL,申请号KR19930006187-传众专利搜索

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发明名称	APPARATUS TO CLEAN SOLID SURFACES USING A CRYOGENIC AEROSOL
摘要
申请公布号	KR960003112(B1)	申请公布日期	1996.03.05
申请号	KR19930006187	申请日期	1993.04.14
申请人	AIR PRODUCTS AND CHEMICALS INC.;INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	MCDERMOTT, WAYNE T.;WU, JIN J.;OCKOVIC, RICHARD C.
分类号	B08B7/00;B24C3/12;B24C3/32;B24C9/00;H01L21/00;(IPC1-7):B08B3/02	主分类号	B08B7/00
代理机构		代理人
主权项
地址

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