| 摘要 |
<p>A force transducer in which a deflectable seismic mass is supported on a frame by support means is disclosed. The seismic mass at rest includes a plane and when the seismic mass is deflected by any force the mass always retains the plane parallel to the rest position. Any deflection of the seismic mass is purely topographically translational movement with no rotational movement allowed. The invention allows three identical structure to be etched onto a flat semiconductor wafer and yet can be used to determine accelerations in three perpendicular directions. As the structures deflect, the surfaces of their seismic masses always remain parallel to the wafer surface. This enables measurement of the deflection to be made easily, for example by depositing electrodes on the surfaces of the seismic masses and fixed surfaces (such as deflection stops) and measuring the change in capacitance between the electrodes. Cross coupling effects will be negligible since each transducer is stiff in all directions except the sensitive direction.</p> |
