发明名称 |
Arc discharge coating apparatus with auxiliary ionization anode. |
摘要 |
<p>An electric arc coating is comprised of a chamber with a chamber wall for receiving the substrates to be coated. The chamber can be evacuated and be optionally filled with a reaction gas or an inert gas. The device has at least one cathode connected to a first direct current source positioned within the chamber so as to be electrically insulated. The cathode is consumed by the electric arc. A second direct current source having a higher voltage than the first direct current source is connected with its negative pole to the substrates to be coated and is electrically insulated from the chamber. A first and a second anode are provided whereby the second anode is electrically insulated from the first anode and connected to a third current source. The positive poles of the first and the second current sources are connected to at least the first anode.</p> |
申请公布号 |
GR3018272(T3) |
申请公布日期 |
1996.02.29 |
申请号 |
GR19950403390T |
申请日期 |
1995.11.30 |
申请人 |
METAPLAS OBERFLAECHENVEREDELUNGSTECHNIK GMBH |
发明人 |
VETTER, JOERG;SCHMIDT-MAUER, MANFRED;MATENTZOGLU NIKOLAUS |
分类号 |
C23C14/02;C23C14/32;H01J37/32;(IPC1-7):C23C14/32 |
主分类号 |
C23C14/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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