发明名称 Arc discharge coating apparatus with auxiliary ionization anode.
摘要 <p>An electric arc coating is comprised of a chamber with a chamber wall for receiving the substrates to be coated. The chamber can be evacuated and be optionally filled with a reaction gas or an inert gas. The device has at least one cathode connected to a first direct current source positioned within the chamber so as to be electrically insulated. The cathode is consumed by the electric arc. A second direct current source having a higher voltage than the first direct current source is connected with its negative pole to the substrates to be coated and is electrically insulated from the chamber. A first and a second anode are provided whereby the second anode is electrically insulated from the first anode and connected to a third current source. The positive poles of the first and the second current sources are connected to at least the first anode.</p>
申请公布号 GR3018272(T3) 申请公布日期 1996.02.29
申请号 GR19950403390T 申请日期 1995.11.30
申请人 METAPLAS OBERFLAECHENVEREDELUNGSTECHNIK GMBH 发明人 VETTER, JOERG;SCHMIDT-MAUER, MANFRED;MATENTZOGLU NIKOLAUS
分类号 C23C14/02;C23C14/32;H01J37/32;(IPC1-7):C23C14/32 主分类号 C23C14/02
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