发明名称 APPARATUS FOR AND METHOD OF FORMING UNIFORM THIN COATINGS ON LARGE SUBSTRATES
摘要 <p>A plasma system (80) forms a dense, uniform coating of metallic oxide or other material on a relatively large substrate (94) of metal foil or other compositions located a substantial distance from the plasma gun (84) so that the plasma stream (92) covers the entire width of the substrate (94). A large pressure differential between the pressure inside the plasma gun (84) and the ambient pressure outside of the plasma gun (84) creates a shock pattern within the exiting plasma stream (92) so as to disperse the plasma stream and maintain a high energy level therein, as well as throughly mixing a coating material (96) introduced into the plasma stream (92) within the gun. The plasma stream (92) is delivered in a long, narrow configuration across the width of the substrate by a nozzle with a slit-like opening at the lower end of the plasma gun (84).</p>
申请公布号 WO9606517(A1) 申请公布日期 1996.02.29
申请号 WO1995US10131 申请日期 1995.08.08
申请人 ELECTRO-PLASMA, INC. 发明人 MUEHLBERGER, ERICH
分类号 H05H1/46;B05B7/22;B41N3/03;C23C4/12;(IPC1-7):H05H1/26;C23C4/10;B23K10/00;C23C4/00;H05H1/34 主分类号 H05H1/46
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