发明名称 METAL ION REDUCTION IN NOVOLAK RESIN SOLUTION USING AN ANION EXCHANGE RESIN
摘要 <p>The present invention provides methods for producing water insoluble, aqueous alkali soluble novolak resins having a very low level of metals ions, utilizing a specially treated anion exchange resin. A method is also provided for producing photoresist composition having a very low level of metal ions from such novolak resins and for producing semiconductor devices using such photoresist compositions.</p>
申请公布号 WO1996006121(A1) 申请公布日期 1996.02.29
申请号 US1995009855 申请日期 1995.08.03
申请人 发明人
分类号 主分类号
代理机构 代理人
主权项
地址