APPARATUS AND METHOD FOR MAKING METAL OXIDE SPUTTERING TARGETS

摘要

An apparatus and process for making metal oxide sputtering targets from volatile and thermally unstable metal oxide powder (11) by hotpressing the metal oxide powder (11) in a graphite die assembly (12) having a ceramic barrier sleeve (24) disposed therein to isolate the metal oxide powder (11) from the graphite die assembly (12) components. To avoid the drawbacks of retaining vapors and gases in the powdered target material during hot-pressing, a gas release device is disposed within the die cavity (19) to minimize the amount of trapped vapor and gas. Heat treating said powdered target starting material prior to loading said material into said die cavity to partially reduce said powder also reduces the amount of vapor and gas retained in the powdered target material during hot-pressing.