发明名称 IMPROVED WAFER AND METHOD OF MAKING SAME
摘要 A wafer and a method of making a wafer containing a plurality of severable transducer chips includes a wafer; a plurality of transducer chips formed on the wafer; and a grid of longitudinal and latitudinal grooves in the wafer for separating the chips from each other and enabling them to be easily, individually severed from the wafer, as well as a transducer chip and a method of making it, having integrally raised contacts adapted for a flip chip or beam lead interconnection, with a transducer formed on the chip; and a plurality of raised contacts integrally formed with the chip and electrically interconnected with the transducer.
申请公布号 WO9605617(A1) 申请公布日期 1996.02.22
申请号 WO1995US07521 申请日期 1995.06.12
申请人 THE CHARLES STARK DRAPER LABORATORY, INC. 发明人 BERNSTEIN, JONATHAN, J.
分类号 G01H11/06;H01L27/20;(IPC1-7):H01L29/06 主分类号 G01H11/06
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