Gasverteilungssystem und Verfahren zur Benutzung dieses Systems,申请号DE19906024719-传众专利搜索

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发明名称	Gasverteilungssystem und Verfahren zur Benutzung dieses Systems
摘要
申请公布号	DE69024719(D1)	申请公布日期	1996.02.22
申请号	DE19906024719	申请日期	1990.08.07
申请人	APPLIED MATERIALS, INC., SANTA CLARA, CALIF., US	发明人	SALFELDER, JOSEPH F., CAMPBELL, CALIFORNIA 95008, US
分类号	C23F4/00;H01J37/32;H01L21/302;H01L21/3065;H01L21/311;(IPC1-7):H01L21/00	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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