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发明名称
Verfahren zur Herstellung von feinteiligem kristallinem Siliciumnitrid
摘要
申请公布号
DE59204972(D1)
申请公布日期
1996.02.22
申请号
DE19925004972
申请日期
1992.03.24
申请人
HOECHST AG, 65929 FRANKFURT, DE
发明人
KRAUSE, WERNER, DR., W-5030 HUERTH, DE
分类号
C01B21/068;(IPC1-7):C01B21/068
主分类号
C01B21/068
代理机构
代理人
主权项
地址
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