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发明名称
摘要
申请公布号	JPH0816261(B2)	申请公布日期	1996.02.21
申请号	JP19900327283	申请日期	1990.11.28
申请人		发明人
分类号	C23C2/06;C23C2/28;(IPC1-7):C23C2/28	主分类号	C23C2/06
代理机构		代理人
主权项
地址

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