FRICTION VACUUM PUMP WITH PUMP SECTIONS OF DIFFERENT DESIGNS

摘要

The inlet section of the friction vacuum pump consists of a turbomolecular pumping stator (5) and rotor (8) with respective blades (14, 15). The succeeding stage has annular discs (16) fixed to the rotor and co-operating with other annular discs (17) on pref. one-piece stator rings (6). Helical projections (18) between grooves (19) on the latter discs are shaped so as to promote a continuous flow of gas from the inlet flange (12) mated with the vacuum vessel to the outlet (13). The shaft (10) is rotated by a motor (11).