发明名称 Support for disk-shaped articles using the Bernoulli principle
摘要 A support (1, 100) for disk-shaped articles (11), comprises an annular nozzle (8) in a circular surface (9, 10) of the support (1, 100) facing the article (11). The nozzle is fed with compressed gas for the formation of a gas cushion between the support (1) and the disk-shaped article (11). At least one projection (85, 90, 108) in the surface (9, 10) of the support (1, 100) facing the article (11) serves as a rest for the articles. The projection (85, 90, 108) is arranged within the nozzle (8) provided in the surface (9, 10) of the support (1, 100) facing the article (11), at a radial distance outward from the axis (14) of the support (1, 100) but at a distance radially inward from the nozzle (8). The support thus provides a rest for the article (11). The nozzle (8) is so shaped as to direct the gas radially outwardly in all directions from the disk-shaped article (11), thereby to draw the article against the support (1, 100) by the Bernoulli principle.
申请公布号 US5492566(A) 申请公布日期 1996.02.20
申请号 US19940194324 申请日期 1994.02.08
申请人 SUMNITSCH, FRANZ 发明人 SUMNITSCH, FRANZ
分类号 C23F1/08;H01L21/00;H01L21/306;H01L21/683;(IPC1-7):B25B11/00;B05C13/00 主分类号 C23F1/08
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