RADIATION SENSITIVE RESIN COMPOSITION

摘要

PURPOSE:To obtain a radiation sensitive resin compsn. having no toxicity to reproduction and giving a radiation sensitive resin coating film almost free from defects such as cissing by combining a styrene copolymer with a solvent such as 1-methoxy-2-acetoxypropane. CONSTITUTION:This radiation sensitive resin compsn. contains a copolymer of styrene with halobenzoylalkyl methacrylate and/or halobenzoyl-hydroxyalkyl methacrylate. The copolymer has a structure represented by the formula, wherein R is 1-5C, preferably 2-4C alkylene which may have hydroxyl and each of X1 and X2 is H or halogen such as Cl or Br but at least one of them is halogen.