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发明名称
PLASMA TREATMENT DEVICE
摘要
申请公布号
JPH0850996(A)
申请公布日期
1996.02.20
申请号
JP19940184321
申请日期
1994.08.05
申请人
ANERUBA KK
发明人
NOGAMI YUTAKA
分类号
H05H1/46;C23F4/00;(IPC1-7):H05H1/46
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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